| 用光学透射谱分析薄膜光学参量的一种简易方法 |
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| 引用本文： | 赵强,王基庆,柴志方.用光学透射谱分析薄膜光学参量的一种简易方法[J].光子学报,2009,38(8). |
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| 作者姓名： | 赵强 王基庆 柴志方 |
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| 作者单位： | 华东师范大学,上海,200241 |
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| 基金项目： | 上海高校选拔培养优秀青年教师科研基金 |
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| 摘 要： | 基于经典的色散理论建立的单振子光谱分析模型,通过理论推导,借助计算机辅助处理,提出了一种比较简捷直观的只利用垂直透射光谱对薄膜光谱进行分析的方法.利用这种方法分析了直流溅射制备的ZnO薄膜的透射光谱,计算出了薄膜在透明振荡区的折射率色散关系以及厚度等参量,并对分析方法给出了验证.
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| 关 键 词： | 单振子模型 光谱分析 薄膜 |
A Simple Method of Deducing the Optical Constants of Thin Films Using the Optical Transmission Spectrum |
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| ZHAO Qiang,WANG Ji-qing,CHAI Zhi-fang.A Simple Method of Deducing the Optical Constants of Thin Films Using the Optical Transmission Spectrum[J].Acta Photonica Sinica,2009,38(8). |
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| Authors: | ZHAO Qiang WANG Ji-qing CHAI Zhi-fang |
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| Institution: | East China Normal University;Shanghai 200241;China |
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| Abstract: | According to the single oscillator expression,based on a based on classic electromagnetic dispersion model,a simple and efficient computer program aided method for deducing the optical refractive index and thickness of a thin film from the normal-incident transmission spectrum was proposed.A dc sputtered ZnO film was analyzed using the method,The results demonstrated that the method is practicable. |
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| Keywords: | Single oscillator expression Optical spectrum analysis Thin film |
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