| 透射式GaAs光电阴极AlGaAs/GaAs外延层倒易点二维图分析 |
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| 引用本文： | 李晓峰,张景文,高鸿楷,侯洵.透射式GaAs光电阴极AlGaAs/GaAs外延层倒易点二维图分析[J].光子学报,2002,31(3):312-316. |
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| 作者姓名： | 李晓峰 张景文 高鸿楷 侯洵 |
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| 作者单位： | 中国科学院西安光学精密机械研究所光电子学研究室,西安,710068 |
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| 摘 要： | 本文介绍了摇摆曲线和倒易点二维图在评价晶格完整性时的特点,分析了透射式GaAs光电阴极样品AlGaAs/GaAs外延层的倒易点二维图,获得了晶面弯曲以及AlGaAs外延层中Al组份变化等方面的信息,为优化外延工艺提供了可靠的保证.
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| 关 键 词： | AlGaAs/GaAs X射线衍射 光电阴极 倒易点二维图 |
| 收稿时间： | 2001/7/6 |
| 修稿时间： | 2001年7月6日 |
THE ANALYSIS ON THE RECIPROCAL SPACE MAPPING OF THE AlGaAs/GaAs EPITAXIAL LAYER IN THE TRANSPARENT GaAs PHOTOCATHODE |
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| Li Xiaofeng,Zhang Jingwen,Gao Hongkai,Hou Xun.THE ANALYSIS ON THE RECIPROCAL SPACE MAPPING OF THE AlGaAs/GaAs EPITAXIAL LAYER IN THE TRANSPARENT GaAs PHOTOCATHODE[J].Acta Photonica Sinica,2002,31(3):312-316. |
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| Authors: | Li Xiaofeng Zhang Jingwen Gao Hongkai Hou Xun |
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| Institution: | Xi’an Institute of Optics and Precision Mechanics.Chinese Academy of Sciences, Xi’an 710068 |
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| Abstract: | This paper illustrated the characteristics of rocking curve and reciprocal space mapping respectively.Through analysising on the reciprocal space mapping of AlGaAs/GaAs epitaxial layer of transparent GaAs photocathode,the deforming informations of the lattice and composition of the AlGaAs/GaAs epitaxial layer were obtained.This helps to optimize the MOCVD growth procedure of AlGaAs/GaAs epitaxial layer. |
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| Keywords: | GaAs/AlGaAs X-ray diffraction Photocathode Reciprocal space mapping |
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