| 石英晶体振荡法监控膜厚研究 |
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| 引用本文： | 占美琼,张东平,杨健,贺洪波,邵建达,范正修.石英晶体振荡法监控膜厚研究[J].光子学报,2004,33(5):585-588. |
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| 作者姓名： | 占美琼 张东平 杨健 贺洪波 邵建达 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海市800-211信箱,上海,201800 |
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| 基金项目： | 国家 8 6 3高技术计划课题的资助项目 (86 3 80 4 2 ) |
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| 摘 要： | 给出了石英晶体振荡法监控膜厚的基本原理,在相同的工艺条件下分别用光电极值法和石英晶体振荡法监控膜厚,对制备的增透膜的反射光谱曲线进行了比较,并对石英晶体振荡法的监控结果做了误差分析.结果表明:石英晶体振荡法不仅膜厚监控精度高,而且能监控沉积速率,获得稳定的膜层折射率,从而有效地控制薄膜的光学性能.
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| 关 键 词： | 光学薄膜 石英晶体振荡法 光电极值法 工具因子 误差 |
| 收稿时间： | 2003-06-02 |
| 修稿时间： | 2003年6月2日 |
Thickness Monitoring by Quartz Crystal Oscillation for Optical Coatings |
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| Institution: | (Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences P.O.Box:800-211, Shanghai 201800) |
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| Abstract: | The thickness monitoring methods of optical coatings mainly include photoelectric extremum method and quartz crystal oscillation method. The principle of coating thickness monitoring by quartz crystal oscillation is proposed Coating thickness is monitored by the two monitoring methods respectively under the same process. Influence of thickness error is analysed. In contrast with photoelectric extremum method, quartz crystal oscillation method not only has a high degree of accuracy for controlling thickness but also can monitor deposition rate, so it can get better optical performance. |
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| Keywords: | Optical coatings Quartz crystal oscillation Photoelectric extremum method Tooling factor Error |
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