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表面微观形貌测量中数字图象处理的应用
引用本文:惠梅,牛憨笨,许谊,徐毓娴,李庆祥.表面微观形貌测量中数字图象处理的应用[J].光子学报,2001,30(11):1372-1375.
作者姓名:惠梅  牛憨笨  许谊  徐毓娴  李庆祥
作者单位:1. 中国科学院,西安光学精密机械研究所,
2. 清华大学精密仪器与机械学系,
摘    要:应用相移干涉术测量物体表面微观形貌时,由于各种因素的影响,表面形貌的测量会产生失真的现象.本文采用数字信号滤波与平滑技术消除了测量过程中系统误差引起的波纹度及系统噪音,去除了在图象的数字化和传输过程中产生的高频噪音和假轮廓,使得测量结果更接近于实际值.

关 键 词:表面微观形貌  相移干涉术  数字图象处理
收稿时间:2001-04-03
修稿时间:2001年4月3日

APPLICATION OF DIGITAL IMAGE MANAGE IN MICRO-TOPOGRAPHY MEASURE
Hui Mei,Niu Hanbeng,Xu Yi,Xu Yuxian,Li Qingxiang.APPLICATION OF DIGITAL IMAGE MANAGE IN MICRO-TOPOGRAPHY MEASURE[J].Acta Photonica Sinica,2001,30(11):1372-1375.
Authors:Hui Mei  Niu Hanbeng  Xu Yi  Xu Yuxian  Li Qingxiang
Institution:1. Xi’an Institute of Optics and Precision Mechanics, Academia Sinica, Xi’an 710068;2. The Department of Precision Instrument and Mechanics, Tsinghua University, Beijing 100084
Abstract:When applying phase stepping interferometry to measure testing surface,distortion will be caused as a result of various error factor.Digital signal filter and smoothness technique was applied in this paper,and flexuosity and system noise caused by system error in measure process were eliminated.The high frequency noise and artificial profile caused by image digital and transmite process were eliminated too.All of this made the measure results more approach actual numerical value.
Keywords:Micro  topography  Phase  stepping interferometry  Digital image manage
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