电子显微镜散斑照相技术

提出了一种新颖的人工亚微米/纳米散斑制作技术.采用超声波分散亚微米/纳米颗粒，然后利用范德华力、静电力和毛细力将其吸附在试件表面.在特定分辨率的扫描电镜下，物体表面的亚微米/纳米颗粒可以看作是亚微米/纳米散斑.此外，发展了一种测量面内亚微米/纳米级变形的电子显微镜散斑照相技术.详细介绍了人工制作亚微米/纳米散斑和电子显微镜散斑照相技术,实验验证了技术的可行性

Electron Microscope Speckle Photography Technique

A novel artificial sub-micron or nanometer speckle fabricating technique was proposed by taking advantage of sub-micron or nanometer particles.In the technique,sub-micron or nanometer particles were adhered to an object surface by using ultrasonic dispersing technique.The particles on the object surface can be regarded as sub-micron or nanometer speckle by using a Scanning Electronic Microscope (SEM) at a special magnification.And,an Electron Microscope Speckle Photography (EMSP) method was developed to measure in-plane submicron or nanometer deformation of the object coated with the artificial sub-micron or nanometer speckles.The principle of artificial sub-micron or nanometer speckle fabricating technique and the EMSP method were discussed in detail.The experimental results verified that the artificial sub-micron or nanometer speckle fabricating technique and EMSP method is feasible.