微型化光纤法布里-珀罗传感器腔长一致性的控制研究

研究了光纤法布里-珀罗腔传感器的腔长一致性的控制技术.通过三维调整架组成微调装置来控制全光纤法布里-珀罗腔的腔长;结合法布里-珀罗腔的工作原理,利用光谱分析仪实时检测加工过程中法布里-珀罗腔的腔长并用装置予以修正;以热熔接的方法将毛细玻璃管与光纤加工成法布里-珀罗腔;利用超景深光学显微系统检查加工的法布里-珀罗腔的关键部位的结构,并对熔接点的牢固性进行了检测.实验结果和数据分析显示:法布里-珀罗腔的腔长得到了较好的控制及一致性,熔接部位的变形和对法布里-珀罗腔的性能的影响也很小.该工艺可用于制备全光纤法布里-珀罗腔传感器.

Control of the Cavity Length Consistency of Miniaturization Optical Fiber F-P Sensor

A kind of optical fiber F-P sensor was studied for the control of the cavity length consistency. The cavity length was controlled by three-dimension frames. On the basis of the F-P cavity principle, the F-P cavity was under real-time detection by spectrum analyzer and then was adjusted. The F-P cavity was composed of hollow glass tube and optical fiber with the method of thermal fusion. The key parts of the processed F-P cavity were examined using optical microscope, and the fusion points were examined on their robustness. The results show that the F-P cavity length is better controlled and the consistency is good. The fusion areas are little out of shape and it has few influences on the F-P cavity's performance.