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| 高准确度多功能激光直写装置 | |
| 引用本文： | 范永涛,徐文东,刘前,郭传飞,曹四海.高准确度多功能激光直写装置[J].光子学报,2014,38(10):2476-2480. |
| 作者姓名： | 范永涛 徐文东 刘前 郭传飞 曹四海 |
| 作者单位： | （1 中国科学院上海光学精密机械研究所,上海 201800） （2 国家纳米科学中心,北京 100080） |
| 基金项目： | 国家高技术研究发展计划项目 |
| 摘 要： | 采用高数值孔径物镜和高准确度纳米平台搭建了一台激光直写装置,可以在光敏感薄膜材料上进行打点、刻画矢量和标量图形等多种操作,其最小特征尺寸小于300 nm,重复性5 nm.在刻写前准确标定刻写激光功率,刻写过程中采用象散法精确自动聚焦,刻写完成后采用两种不同波长的激光束探测样品的透过率和反射率的细微变化,最终实现了高准确度亚微米图形的刻写和检测. |
| 关 键 词： | 激光直写 微纳加工 自动聚焦 功率标定 |
| 收稿时间： | 2008-12-22 |
High Precise Multifunctional Laser Direct Writing System |
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| FAN Yong-tao,XU Wen-dong,LIU Qian,GUO Chuan-fei,CAO Si-hai.High Precise Multifunctional Laser Direct Writing System[J].Acta Photonica Sinica,2014,38(10):2476-2480. | |
| Authors: | FAN Yong-tao XU Wen-dong LIU Qian GUO Chuan-fei CAO Si-hai |
| Institution: | (1 Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China) (2 The National Center for Nanoscience and Technology(NCNST) of China,Beijing 100080,China) |
| Abstract: | A laser direct writing system was designed and constructed,which can plot or pattern vector and scalar graphics on arbitrary photosensitive films.The direct writing feature size is 300 nm,and the displacement accuracy is 5 nm.To maitain the repeatability and stability of the writing system,the actural writing laser power was calibrated.In the writing process,astigmatic method was employed for precise autofocus.In the testing process,two kinds of lasers with different wavelengths are used to detect the variation of transmissivity and reflectivity.With this platform,submicron graph can be written and detected with high precision. |
| Keywords: | Laser direct writing Micro-nano machining Autofocus Power calibration |
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