硅基光波导芯层材料及波导分束器的制备

本文采用溶胶－凝胶法制备了具有紫外感光性的SiO2/ZrO2/H有机无机复合薄膜，利用分光式椭偏仪测得该薄膜在光纤的常用通信窗口0.85 μm、1.31 μm和1.55 μm波长附近折射率分别为1.556 9、1.548 9和1.547 2，与下包层SiO2的折射率（1.46）相比，其折射率差比δ分别为6.64％，6.09％和5.97％，可作为芯层材料用于光波导的制备.通过控制提拉速率可以制作出厚度分别为1.29，2.20，4.00，5.44和6.82 μm的SiO2/ZrO2/H芯层薄膜，以满足0，1，2，3和4阶导模的传输要求.进而利用该薄膜自身的感光特性结合紫外掩模法，制备出相应厚度的1×8Y分支光功率分配器.通光实验表明，该光功分器能够将1.53～1.56 μm波长的光限制在波导内，实现光的传输和分束功能.

Fabrication of the Si based Waveguide Core Materials and the Splitters

UV photosensitive Organic inorganic composite SiO2/ZrO2/H gel film was fabricated using sol gel method.The UV spectra shows that the gel film presents three absorption peaks at 242，325 and 379 nm respectively.With increasing the UV exposure time,these absorption peaks are decreased due to the photodecomposition of the photosensitive chelate ring which indicates the UV photosensitive property of the gel film.And,the refraction index of SiO2/ZrO2/H film examined by spectroscopic ellipsometer is 1.556 9、1.548 9 and 1.547 2 at the 0.85、1.31 and 1.55 μm respectively.Compared with the SiO2 cladding,the refractive index difference is 6.64％,6.09％ and 5.97％,which can be used to fabricate waveguide splitter as the core materials.By controlling the dip coating rate,the SiO2/ZrO2/H core films with the different thickness of 1.29，2.20，4.00，5.44 and 6.82 μm are obtained which can realize the 0，1，2，3 and 4 mode propagation.And using these films,the 1×8 Y branch optical power splitters were fabricated correspondingly by UV irradiation,which can enable the light with the wavelength of 1.53~1.56 μm transmit in it and be split into 8 branches.