| 溶胶-凝胶(sol-gel)法制作掺铒Al2O3薄膜及其光致发光光谱特性测量 |
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| 引用本文： | 李成仁,宋昌烈,李淑凤,高景生.溶胶-凝胶(sol-gel)法制作掺铒Al2O3薄膜及其光致发光光谱特性测量[J].光子学报,2003,32(12):1514-1517. |
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| 作者姓名： | 李成仁 宋昌烈 李淑凤 高景生 |
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| 作者单位： | 1. 大连理工大学物理系,辽宁,大连,116024;辽宁师范大学物理系,辽宁,大连,116029
2. 大连理工大学物理系,辽宁,大连,116024 |
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| 基金项目： | 国家自然科学基金(No.69889701)、辽宁省科技厅(No.20022110)、辽宁省教育厅(202123198)和大连市科技局资助项目 |
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| 摘 要： | 介绍一种用溶胶-凝胶方法制作掺铒Al2O3薄膜的工艺.实验测量了薄膜样品的光致发光光谱特性.结果表明光致发光光谱的峰值波长为1.536 μm,半值宽度为34 nm;同时测量了光致发光光谱的峰值强度与泵浦功率、掺铒浓度及退火温度之间的关系.
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| 关 键 词： | sol-gel法 掺铒Al2O3薄膜 光致发光特性 |
| 收稿时间： | 2003/2/26 |
| 修稿时间： | 2003年2月26日 |
Er-doped Al2O3 Thin Films Fabricated by Sol-gel Processes and Measurement of Photoluminescence Characteristics |
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| Li Chengren ,Song Changlie ,Li Shufeng ,Gao Jingsheng Physics.Er-doped Al2O3 Thin Films Fabricated by Sol-gel Processes and Measurement of Photoluminescence Characteristics[J].Acta Photonica Sinica,2003,32(12):1514-1517. |
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| Authors: | Li Chengren Song Changlie Li Shufeng Gao Jingsheng Physics |
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| Institution: | Li Chengren 1,2,Song Changlie 1,Li Shufeng 1,Gao Jingsheng 1 1 Physics Department of Dalian University of Technology,Dalian,Liaoning 116024 2 Physics Department of Liaoning Normal University,Dalian,Liaoning 116029 |
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| Abstract: | Fabrication technique of Er-doped Al2O3 thin films by the sol-gel processes is introduced. Photoluminescence characteristics of the samples are measured. The results show that the peak wavelength of the photoluminescence spectra is 1.536 μm and FWHM(Full Width at Half Maximum)is 34 nm.The dependence of the peak emission intensity on the pump power, the Er-doped concentrations, as well as the annealing temperature are investigated. |
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| Keywords: | Sol-gel processes Er-doped Al_2O_3 thin films Photoluminescence characteristics |
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