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基于非周期多层膜的X射线成像研究
引用本文:顾春时,王占山,穆宝忠,王风丽,张众,秦树基,陈玲燕.基于非周期多层膜的X射线成像研究[J].光子学报,2006,35(6):881-885.
作者姓名:顾春时  王占山  穆宝忠  王风丽  张众  秦树基  陈玲燕
作者单位:同济大学精密光学工程技术研究所物理系,上海,200092
基金项目:高比容电子铝箔的研究开发与应用项目 , 上海市博士后科研项目
摘    要:设计了惯性约束聚变(ICF)诊断实验用X射线Kirkpatrick-Baez(KB)显微镜,给出了系统的结构参量.使用ZEMAX光学软件对KB型显微镜进行了性能模拟,结果表明:在8 keV能点,放大率为8倍时,轴上点的最佳空间分辨率小于2 μm,200微米视场的空间分辨率优于10μm.采用磁控溅射方法制备了W/B4C非周期多层膜,经X射线衍射仪(XRD,工作能量8 keV)测量,其反射率为20%,带宽为0.3°,达到了KB型显微镜成像系统的要求.使用Cu靶X射线管进行了成像实验,得到了放大倍数分别为1倍和2倍的一维X射线像.

关 键 词:KB型显微镜  X射线非周期多层膜  X射线成像  空间分辨率
收稿时间:2006-02-20
修稿时间:2006年2月20日

Imaging Research with Non-periodic Multilayers
Gu Chunshi,Wang Zhanshan,Mu Baozhong,Wang Fengli,Zhang Zhong,Qin Shuji,Chen Lingyan.Imaging Research with Non-periodic Multilayers[J].Acta Photonica Sinica,2006,35(6):881-885.
Authors:Gu Chunshi  Wang Zhanshan  Mu Baozhong  Wang Fengli  Zhang Zhong  Qin Shuji  Chen Lingyan
Institution:(Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092)
Abstract:A grazing KB microscope was designed for hard X-ray (8 keV; Cu Ka radiation) imaging in ICF diagnostic experiments. Ray tracing software (ZEMAX) is used to simulate optical system performance. The best theoretical resolution of KB microscope is about 2 micron and better than 10 micron in 200 micron field of view. W/B4C supermirror was deposited on the Si wafer substrate and the reflectivity was measured by X-ray diffraction instrument (XRD). The reflectivity of supermirror is about 20% in 0.3°bandwidth. 8keV Cu target X-ray tube source was used in x-ray imaging experiments and the magnification of 1× and 2× X-ray images are obtained.
Keywords:KB microscope  X-ray non-periodic multilayer  X-ray imaging  Spatial resolution
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