| 干涉仪移相器相位移π/2标定方法的研究 |
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| 引用本文： | 朱煜,陈进榜,朱日宏,陈磊,肖玉玲.干涉仪移相器相位移π/2标定方法的研究[J].光子学报,1999,28(10):951-954. |
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| 作者姓名： | 朱煜 陈进榜 朱日宏 陈磊 肖玉玲 |
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| 作者单位： | 1. 南京理工大学电光学院431教研室,南京,210094
2. 郑州化工学院化机科,郑州,450042 |
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| 摘 要： | 干涉仪移相器的相位标定在很大程度上决定了移相干涉仪的测量精度。本文是用傅里叶变换的原理,测量出推动移相器移动的压电陶瓷堆(PZT)的微位移量,并在此基础上提出了一种用空域滤波法得到干涉因光强分布,并判断其移相误差从而校正移相器步进π/2的方法。本文组建了一套数字平面干涉仪,对干涉仪移相器进行实验,在5步法情况下其移相误差在0.5%以下。
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| 关 键 词： | 干涉仪移相器 微位移 标定 |
| 收稿时间： | 1999-05-31 |
| 修稿时间： | 1999-05-31 |
PHASE CALIBRATING METHOD FOR PHASE-SHIFTING ADAPTER OF INTERFEROMETER |
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| Zhu Yu,Chen Jinbang,Zhu Rihong,Chen Lei,Xiao Yuling.PHASE CALIBRATING METHOD FOR PHASE-SHIFTING ADAPTER OF INTERFEROMETER[J].Acta Photonica Sinica,1999,28(10):951-954. |
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| Authors: | Zhu Yu Chen Jinbang Zhu Rihong Chen Lei Xiao Yuling |
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| Institution: | 1. 431 Institute, School of Electric-Optics, Nanjing University of Science &; Technology Nanjing 210094, China;2. Henan Chemical Engineering School, Zhengzhou 450042, China |
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| Abstract: | A phase calibrating method was proposed to calibrate the error of phase shifting adapter ofinterferometer. Fast Fourier transform (FFT) and Iinear polynomial fitting algorithms were used torectify the nonlinearity of phase shifting adapter. And fringe patterns was changed to frequencydomain by 1-D FFT and the noise was filtered by fringe processing method. Experiments show that thecalibrating accuracy was 0. 5% on the c0ndition of phase shifting being 5 steps. |
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| Keywords: | Phase shifting adapter Micro-displacement Calibration |
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