多层衍射光学元件设计原理与衍射效率的研究

叙述了多层衍射光学元件的设计原理.通过对多层衍射光学元件结构、位相延迟表达式、材料选择匹配的研究，使得优化最大光栅高度后的多层衍射光学元件能够实现大幅度提高宽光谱范围内衍射效率的作用.其衍射效率在从g谱线（435.834 3 nm）到C谱线（656.272 5 nm）的可见光范围内的任何波长上的理论衍射效率均在99％以上，带宽积分平均衍射效率为99.7％，能够满足高质量成像光学系统应用的需要，并利用该元件设计了长焦距复消色差物镜.

Design and Diffraction Efficiency of a Multi-Layer Diffractive Optical Element

The design principle,structure,phase expression and material choice of a multi-layer DOE (Diffractive Optical Element)were analyzed.The diffraction efficiency of a multi-layer DOE can be greater than 99% in 0.435 8～0.656 3 μm visual waveband after optimizing the maximal grating depth，and its bandwidth integral diffraction efficiency is 99.7％.So a multi-layer DOE can improve the diffraction efficiency in wide waveband and was the same with a high imaging quality optical system.A long focal-length apochromatic objective lens was simulated using a multi-layer DOE by optical design software.