| 三维形貌检测的自动参考栅象法研究 |
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| 引用本文： | 徐建强.三维形貌检测的自动参考栅象法研究[J].光子学报,1998,27(6):553-557. |
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| 作者姓名： | 徐建强 |
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| 作者单位： | 山东工业大学数理系 |
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| 摘 要： | 本文提出了一种用于曲面形貌检测的傅里叶变换法中的参考栅象图的自动产生及误差修正方法,通过对实际测量图象的处理,证明该方法具有很好的使用效果,从而大大提高了傅里叶变换法检测曲面形貌的精度和实用性。
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| 关 键 词： | 傅里叶变换 三维形貌测量 参考栅 |
| 收稿时间： | 1997-12-29 |
AUTO REFERENCE GRATING METHOD OF 3 D SURFACE MEASUREMENT |
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| Xu Jianqiang,Wang Yunshan.AUTO REFERENCE GRATING METHOD OF 3 D SURFACE MEASUREMENT[J].Acta Photonica Sinica,1998,27(6):553-557. |
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| Authors: | Xu Jianqiang Wang Yunshan |
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| Institution: | Xu Jianqiang,Wang Yunshan Department of mathematics and physics,Shandong Polytechnic University,Jinan 250061 |
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| Abstract: | A new method of producing reference grating automatically and error correcting used in Fourier transform profilometry is proposed and verified by experiments.It is proved that the method has very good effect.Thereby this method improves the accuracy and practicality of Fourier transform profilometry greatly. |
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| Keywords: | Fourier transform profilometry 3 D surface measurement Reference grating |
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