移相器微位移旋转误差的分析及测试

以压电陶瓷(PZT)微位移器为主要研究对象, 引入一种处理静态干涉图的新方法--虚光栅移相叠栅条纹法,设计实验对一台实际使用的移相器微位移旋转误差进行测试研究，对其引起的波面旋转情况进行了定量的计算分析，并给出测试结果.用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时，不需要使用任何移相器件，可以进行动态位相的检测，整个移相过程用计算机进行控制，避免了引入额外的移相误差.

Analysis and Test on Rotation Error Induced by the Micro-displacement of Phase-shifter

Based on the theory of linear polynomial fitting algorithm, the micro-displacement error of phase shifter which can induce the rotation of fringes in the processing of phase shift is analyzed. A novel method for static interferogram analysis, named the virtual grating phase-shifting moire fringe method that is based on virtual grating technology, phase-shifting interferometry and moire technology, is introduced and analyzed. When the static interferogram with a certain spatial frequency in the experiment is processed by this method, the phase shift is introduced mathematically and controlled by the computer to avoid any phase-shifting error, so the dynamic phase could he evaluated. Some valuable experiments are carried out and the results are presented to show the feasibility of this error-analysis method. In terms of error analysis, the criterions to control the error are presented.