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激光/红外双波段减反射膜研究
引用本文:杨林峰,熊长新,杨放.激光/红外双波段减反射膜研究[J].光学与光电技术,2009,7(6):52-55.
作者姓名:杨林峰  熊长新  杨放
作者单位:华中光电技术研究所-武汉光电国家实验室,湖北武汉,430074
摘    要:在硫化锌、硒化锌两种基底上开展了激光/中波红外、激光/长波红外双波段减反射膜技术研究。通过采用离子辅助沉积以及镀保护膜层等方法,对膜系结构和镀制工艺进行了优化。研制的激光/红外双波段减反射膜不仅具有良好的光学性能,而且具有较强的抗恶劣环境能力,可以满足实际使用要求。

关 键 词:减反射膜  双波段  激光/红外  硫化锌  硒化锌

Deposition of Laser/IR Dual Band Anti-Reflection Coatings
YANG Lin-feng,XIONG Chang-xin,YANG Fang.Deposition of Laser/IR Dual Band Anti-Reflection Coatings[J].optics&optoelectronic technology,2009,7(6):52-55.
Authors:YANG Lin-feng  XIONG Chang-xin  YANG Fang
Institution:( Huazhong Institute of Electro-Optics Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China )
Abstract:Laser/MWIR and laser/LWlR dual band anti-reflection coatings deposited on ZnS(Znic Sulfide) and ZnSe(Znic selenide) substrates were investigated. The structure and process of these coatings were optimized by means of lAD and deposition of protective coatings. The results show that Laser/IR dual band anti-reflection coatings can meet the requirements of application for its high optical performance and good environmental adaptability.
Keywords:anti-reflection coatings  dual band  laser/IR  ZnS  ZnSe
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