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激光微加工制作的微光纤珐-珀加速度传感器
引用本文:俞晓婧,冉曾令,饶云江.激光微加工制作的微光纤珐-珀加速度传感器[J].光学与光电技术,2010,8(5):13-15.
作者姓名:俞晓婧  冉曾令  饶云江
作者单位:电子科技大学宽带光纤传输和通信网技术教育部重点实验室,四川,成都,611731
基金项目:国家自然科学基金重点项目 
摘    要:将157nm激光微加工制作的微光纤珐-珀腔贴于悬臂梁结构构成加速度传感器。通过设计特定的悬臂梁结构和FFT方法,该加速度传感器的分辨率约为1.13mg/HZ1/2。通过采用MUSIC算法处理信号,信噪比可提高45dB,系统分辨率约为3.56×10^-2μg/Hz1/2。该微光纤珐一珀传感器具有可批量制作、成本低、抗高温、量程灵活等优点,有望应用于石油勘探、地震测量等领域中。

关 键 词:光纤光学  传感器  激光微加工  光纤珐-珀腔  加速度计  MUSIC算法

A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining
YU Xiao-jing,RAN Zeng-ling,RAO Yiun-jiang.A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining[J].optics&optoelectronic technology,2010,8(5):13-15.
Authors:YU Xiao-jing  RAN Zeng-ling  RAO Yiun-jiang
Institution:YU Xiao-jing RAN Zeng-ling RAO Yiun-jiang ( Key Lab of Broadband Optical Fiber Transmission Communication Networks (Education Ministry), University of Electronic Science & Technology of China, Chengdu 611731, China )
Abstract:A miniature Fabry-Perot cavity fabricated by 157 nm laser micro-processing mounted on a cantilever beam structure is used as an accelerometer. By using specific cantilever structure and FFT method, the resolution ratio of the F-P sen sor accelerometer is about 1.13 mg/Hz1/2. By adopting MUSIC algorithm, the signal to noise ratio of such a sensor system is increased 45 dB and the resolution ratio achieved is about 3. 56 ×10^-2μg/Hz1/2. The sensor can be mass produced with low cost, high-temperature-resistant, flexible range, and is anticipated to be used in the field of oil exploration, seismic surveying, etc.
Keywords:fiber optics  sensor  laser micrcymachining  Fabry-Perot cavity  acceleration meter  MUSIC algorithm
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