快速边界识别算法用于达曼光栅掩模数据生成的研究

针对达曼光栅的数据写入问题，提出了一种快速边界识别算法（FBIA）用于复杂二元光学图形掩模的CIF格式数据的生成。该算法首先识别出达曼光栅图形的边界点，然后按照左手原则对边界点进行排序并构成闭合曲线。针对闭合曲线中可能出现的“孤岛”，该算法可自动识别并依据其数量对图形重新分割取点。结果表明FBIA算法具有搜索快、效率高等优点，可广泛应用于各种二元位相型元件CIF格式掩模板数据的生成。

Research on Mask Data Generating of Dammann Grating by Fast Borderline Identification Algorithm

To resolve the problem of data writing for Dammann grating, a fast borderline identification algorithm （FBIA） is proposed in this paper to generate the CIF mask data of complicated binary optical pattern. The algorithm first identifies the border sample-points of Dammann grating pattern and then sorts them to form clockwise or antieloekwise close curves according to the left-hand principle. As to the possible-appeared ＂isolated islands＂ in the close curves, the algoirthm can identify them automatically and reclassify the sample-points to form new curves. With the advantages of fast-searching and high efficiency, the algorithm can be widely applied to the CIF mask data generating for different binary phase elements, such as binary Dammann gratings, binary diffractive lens and binary beam-splitter, etc.