首页 | 本学科首页   官方微博 | 高级检索  
     检索      

高透过率红外窗口保护薄膜的研制
引用本文:熊长新,杨林峰.高透过率红外窗口保护薄膜的研制[J].光学与光电技术,2009,7(6):45-47.
作者姓名:熊长新  杨林峰
作者单位:华中光电技术研究所-武汉光电国家实验室,湖北武汉,430074
摘    要:在Si、Ge红外窗口上利用离子辅助电子束蒸发技术和RF-PECVD技术制备了具有高透过率的AR/DLC保护薄膜,并与单层DLC保护薄膜的光学性能进行了对比。所制备的高透过率保护薄膜达到如下性能:在3~5μm波段,Si基底上一面镀高效红外增透膜一面镀AR/DLC增强型保护薄膜的平均透过率达到约96%,较之镀DLC膜平均透过率提高了约4%。在8~12μm波段,Ge基底上一面镀高效红外增透膜一面镀AR/DLC增强型保护薄膜的平均透过率达到约95%,较之镀DLC膜平均透过率提高了约5%。有关薄膜样品都通过了相应的环境试验。

关 键 词:红外窗口  保护薄膜  光学透过率  环境适应性

Deposition of High Transmittance Protective Coatings on IR Windows
XIONG Chang-xin,YANG Lin-feng.Deposition of High Transmittance Protective Coatings on IR Windows[J].optics&optoelectronic technology,2009,7(6):45-47.
Authors:XIONG Chang-xin  YANG Lin-feng
Institution:( Huazhong Institute of Electro-Optics--Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China )
Abstract:AR/DLC protective coatings were deposited on Si and Ge windows using ion beam assisted electron beam evaporation and RF-PECVD(Radio Frequency-Plasma Enhanced Chemical Vapor Deposition), and the transmittance of deposited coatings were compared with single layer DLC. The transmittance of double side coated Si substrate(one side with high performance IR anti-reflection coatings and the other side with AR/DLC coatings) in 3-5 μm can reach 96%, which is increased about 4% compared with just coated single layer DLC samples. The transmittance of double side coated Ge substrate (one side with high performance IR anti-reflection coatings and the other side with AR/DLC coatings) in 8-12μm can reach 95 %, which is increased about 5 % compared with just coated single layer DLC samples.
Keywords:IR window  protective coatings  optical transmittance  environment adaptability
本文献已被 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号