| 一种保护玻璃防水雾透明导电薄膜的设计与制备 |
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| 引用本文： | 马永龙,刘红光.一种保护玻璃防水雾透明导电薄膜的设计与制备[J].光学与光电技术,2011,9(3):56-58,63. |
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| 作者姓名： | 马永龙 刘红光 |
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| 作者单位： | 1. 海军驻中南地区光电系统军事代表室,湖北武汉,430073
2. 中国人民解放军92995部队,山东青岛,266000 |
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| 摘 要： | 为了使光学仪器能适应低温潮湿环境,设计了一种复合型的保护玻璃防水雾透明导电薄膜.采用非平衡闭合磁场反应溅射技术在K9玻璃基底上沉积了氧化铟锡(ITO)导电膜以及复合型的透明导电膜系.采用光谱仪、方阻仪测试了样品的透射光谱以及方块电阻,并对样品进行了环境试验.结果表明,样品的光学技术指标以及抗恶劣环境性能均达到了使用要求...
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| 关 键 词： | 透明导电薄膜 非平衡闭合磁场反应溅射 ITO薄膜 环境试验 |
Design and Preparation of Water-Proof and Antifog Transparent Conductive Coatings for Protecting Glass |
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| MA Yong-long,LIU Hong-guang.Design and Preparation of Water-Proof and Antifog Transparent Conductive Coatings for Protecting Glass[J].optics&optoelectronic technology,2011,9(3):56-58,63. |
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| Authors: | MA Yong-long LIU Hong-guang |
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| Institution: | 1 Zhongnan Electro-Optics Military Respresetative Bureau of Navy,Wuhan 430072,China; 2 Unit 92995 of PLA,Qingdao 266000,China) |
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| Abstract: | Transparent conductive coatings on glass window is designal to make opticed system adapte to low temperature and humid environment ITO coatings and multilayer transparent conductive coatings are deposited onto K9 substrate by means of unbalanced closed field magnetron sputtering.Transmittance and sheet resistance are investigated by spectrometer and four probe ohmmeter.All samples with high optical performance pass the environmental test.The experimental results show that the optical technique specification and the performance of anti-adverse arcumstances are satisfy with the service request |
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| Keywords: | transparent conductive coatings unbalanced closed field magnetron reactive sputtering ITO coatings environmental test |
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