一种半导体表面上微粒缺陷散射场的计算方法

本文通过分析半导体表面上微粒缺陷散射场的光波传播规律,建立了表面上微粒缺陷场的传输模型和数学模型,使定量计算表面上微粒缺陷的散射场成为可能。进一步将入射场和散射场都表达成球矢量波函数的形式,并考虑表面的二次散射作用,用T矩阵将入射场和散射场的展开项系数连系起来。从而得到散射场与入射场之间的一系列定量表达式,并给出计算结果。

A Computing Method for Scattered Field of Particle Defects on Semiconductor Surface

That we will found a transfer model and a mathematic model for particle defects on a surface by analyzing the light wave transmitting principle of particle defects on semiconductor surface will make ration calculation for the scattered field of particle defects on a surface possible. Then the incident field and the scattered field are expressed as a series of spherical vector wave functions and the second scattered field is taken into account, thus the parameters of the incident field and the scattered field can be linked by a T-matrix. Therefore,we will obtain a series ration expressions between the scattered field and the incident field, and then get computing result.