| 采用显微拉曼光谱技术检测激光微加工质量 |
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| 引用本文： | 蒋毅坚,荆涛,陈涛.采用显微拉曼光谱技术检测激光微加工质量[J].光散射学报,2003,15(1):10-14. |
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| 作者姓名： | 蒋毅坚 荆涛 陈涛 |
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| 作者单位： | 北京工业大学国家产学研激光技术中心,北京,100022 |
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| 基金项目： | 国家重点基础研究发展规划资助项目(编号:G2000067205) |
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| 摘 要： | 本文简要介绍了准分子激光微加工的原理;分析比较了几种微检测技术的特点和用途;提出了采用显微拉曼光谱检测准分子激光微加工质量的新技术,并在有机玻璃和光刻胶制成的齿轮上分别进行了探索。研究结果表明:显微拉曼散射技术确实可以成为一种新的检测微加工质量的有效手段。
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| 关 键 词： | 显微拉曼光谱 激光微加工 质量检测 |
| 文章编号： | 1004-5929(2003)01-0010-05 |
| 收稿时间： | 2002/10/18 |
| 修稿时间： | 2002年10月18 |
Quality Inspection of Laser Micro-processing with Using Micro-Raman Spectroscopy |
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| Abstract: | In paper, the principle of excimer laser microprocessing was introduced. Some kinds of technology for microinspection were analyzed and compared. A new technology for quality inspection of excimer laser microprocessing with using microRaman spectroscopy was proposed and tried on the micro gears of plexiglass and PMMA. The research results show that the microRaman scattering technology is really a new and effective method for quality inspection of microprocessing. |
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| Keywords: | Micro-Raman spectroscopy Laser micro-processing Quality inspection |
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