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GaMnAs薄膜洛伦兹振子模型参数提取以及材料缺陷分析
引用本文:蔡娟露,程兴华,钟玉杰,何志刚,史同飞,龚敏,石瑞英.GaMnAs薄膜洛伦兹振子模型参数提取以及材料缺陷分析[J].光散射学报,2011,23(3):238-243.
作者姓名:蔡娟露  程兴华  钟玉杰  何志刚  史同飞  龚敏  石瑞英
作者单位:1. 四川大学物理科学与技术学院微电子学系,成都,610064
2. 微电子技术四川省重点实验室,成都,610064
3. 中科院固体物理所
基金项目:国家自然科学基金(60676052)
摘    要:利用改进的遗传算法从GaMnAs外延薄膜的远红外反射光谱中提取了GaMnAs薄膜的洛伦兹振子模型参数,发现GaAs掺入Mn后,ωTO向低频方向移动,ωLO基本保持不变,ε∞和εs均减小,γ有很大变化.并通过XRD以及近红外谱发现Mn的掺入会引入缺陷,这种缺陷会影响晶格质量,导致γ发生很大变化.

关 键 词:GaMnAs  遗传算法  洛伦兹振子模型  缺陷  XRD  红外光谱
收稿时间:2011/4/29

The Parameter extraction of GaMnAs Lorentz Oscillator Model and Defect Analysis
CAI Juan-lu,CHENG Xing-hua,ZHONG Yu-jie,HE Zhi-gang,SHI Tong-fei,Gong Ming,SHI Rui-ying.The Parameter extraction of GaMnAs Lorentz Oscillator Model and Defect Analysis[J].Chinese Journal of Light Scattering,2011,23(3):238-243.
Authors:CAI Juan-lu  CHENG Xing-hua  ZHONG Yu-jie  HE Zhi-gang  SHI Tong-fei  Gong Ming  SHI Rui-ying
Institution:CAI Juan-lu,CHENG Xing-hua,ZHONG Yu-jie,HE Zhi-gang,SHI Tong-fei,Gong Ming,SHI Rui-ying(1.Department of Microelectronics,Sichuan University,Chengdu 610064,China,2.Key Lab of Microelectronics technology of Sichuan province,China)
Abstract:The revised genetic algorithm was successfully used to extract the Lorentz oscillator model parameters of GaMnAs from far-infrared reflectance spectra.Comparing the Lorentz oscillator model parameters of GaMnAs with those of GaAs,it was found that ωTO moved to lower frequencies,ε∞ and εs decreased,γ changed greatly,but the ωLo was almost not changed.Analysis on XRD and near-infrared spectrum of GaMnAs shows that introduced defects by Mn incorporation affects the quality of lattice and leads γ changed dramatically.
Keywords:GaMnAs  genetic algorithm  lorentz oscillator model  defect  XRD  infrared spectroscopy  
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