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等离子清洗处理SERS活性金岛膜表面杂质的研究
引用本文:郭浩,丁丽,莫育俊.等离子清洗处理SERS活性金岛膜表面杂质的研究[J].光散射学报,2011,23(1):28-32.
作者姓名:郭浩  丁丽  莫育俊
作者单位:1. 河南大学物理与电子学院,开封,475004;日本综合研究大学院大学分子科学研究所,冈崎,444-8585
2. 黄河水利职业技术学院自动化工程系,开封,475003
3. 河南大学物理与电子学院,开封,475004
摘    要:采用真空蒸镀法在硅片表面形成了一层具有表面增强拉曼活性的金岛膜.拉曼光谱发现该金岛膜表面存在非晶态碳的污染物.通过比较不同清洗方法的拉曼光谱可以证明,用氧气等离子体清洗金岛膜可有效去除金表面的杂质.金岛膜的表面增强拉曼活性在清洗前后没有发生明显变化.

关 键 词:金岛膜  表面增强拉曼光谱  等离子体清洗  除杂
收稿时间:2010/11/8

A Research on Plasma Cleaning for Removing Contaminants from SERS-active Gold Island Films Surfaces
GUO Hao,DING Li,MO Yu-jun.A Research on Plasma Cleaning for Removing Contaminants from SERS-active Gold Island Films Surfaces[J].Chinese Journal of Light Scattering,2011,23(1):28-32.
Authors:GUO Hao  DING Li  MO Yu-jun
Institution:1(1.School of Physics and Electronics,Henan University,Kaifeng 475004,China;2.Automation Engineering Department,Yellow River Conservancy Technical Institute,Kaifeng 475003,China;3.Institute for Molecular Science,The Graduate University for Advanced Studies(Sokendai),Okazaki 444-8585,Japan)
Abstract:Gold island films were prepared by vacuum deposition of gold wire on to silicon substrate.Raman spectra analysis indicated that the resulting gold island films surfaces were polluted by amorphous carbon.Oxygen plasma cleaning was used to remove surface contaminants.A comparison between the Raman spectra of different cleaning methods proved that oxygen plasma cleaning removed the amorphous carbon from gold surfaces effectively.The plasma-treated sample surfaces didn't show significant change in SERS enhancement.
Keywords:gold island films  SERS  plasma cleaning  removing contaminants
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