| 高温高压固态复分解反应法生长氮化镓的应变性质研究 |
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| 引用本文： | 马瑶,龚敏,马欢,贺端威.高温高压固态复分解反应法生长氮化镓的应变性质研究[J].光散射学报,2011,23(2):133-137. |
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| 作者姓名： | 马瑶 龚敏 马欢 贺端威 |
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| 作者单位： | 1. 四川大学物理科学与技术学院徽电子技术四川省重点实验室,成都,610064
2. 四川大学原子与分子物理研究所,成都,610065 |
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| 摘 要： | 本文采用高温高压下固态复分解反应法生长氮化镓.用X射线衍射仪、扫描电子显微镜、激光拉曼光谱仪对其进行分析,结果表明生成了六角纤锌矿结构的氮化镓晶体.该样品在宏观上受到了张应力的作用,退火后,宏观的应变状态由张应变向压应变转变;晶体微观应力减小,晶粒尺寸变大,晶体质量变好.
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| 关 键 词： | 氮化镓 X射线衍射 拉曼光谱 应变 应力 退火 |
| 收稿时间： | 2011/3/2 |
A Study of Strain States of Gallium Nitride Prepared Through Solid-State Metathesis Reaction Under High Pressure and High Temperature. |
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| MA Yao,GONG Min,MA Huan,HE Duan-wei.A Study of Strain States of Gallium Nitride Prepared Through Solid-State Metathesis Reaction Under High Pressure and High Temperature.[J].Chinese Journal of Light Scattering,2011,23(2):133-137. |
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| Authors: | MA Yao GONG Min MA Huan HE Duan-wei |
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| Institution: | 1.School of Physical Science and Technology,Sichuan Province Key Laboratory of Microelectronics Sichuan University,Chengdu 610064,China;2.Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China) |
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| Abstract: | Gallium nitride(GaN) crystals have been prepared through solid-state metathesis reaction under high pressure and high temperature.X-ray diffraction(XRD)、Scanning electron microscopy(SEM)and Raman spectra(Raman) were used to analyse the crystals.The results indicated that the crystals were hexagonal Gallium nitride and its macrostress was tensile.After anneal,the strain states of the crystals changed from tensile to compressive,and the microstress reduced,the size increased and the quality became better. |
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| Keywords: | GaN XRD Raman spectra stain stress anneal |
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