Surface microstructure and morphology study of thin films produced from volatile fluorine-containing rare-earth β-diketonate complexes and their adducts |
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| Authors: | L D Nikulina L F Bakhturova V S Danilovich |
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| Institution: | (1) Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090, Russia |
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| Abstract: | We present the results of a surface microstructure and morphology study of thin films produced from volatile fluorine-containing rare-earth β-diketonate complexes and their adducts. Films 0.2–0.4 μm in thickness were synthesized in vacuum by means of thermal deposition of the parent substances at a pressure of 5 × 10?4?1 × 10?3 Pa and a deposition rate of 3 × 10?3 μm s?1 (for NaNd(FOD)4 films, the deposition rate was 8 × 10?2 μm s?1). The microstructure of films depends on the deposition conditions. The films of NaNd(PTFA)4] and NaNd(FOD)4] complexes and Ln(PTFA)3 · S1 adducts have an amorphous structure. The NaNd(PTFA)4(Phen)] and Nd(PTFA)3 · S2 films are characterized by a more ordered polycrystalline structure with the grain size ranging from 0.2 to 1.5 μm. |
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