Calculation of ion and fast atom contributions to the sputtering non-uniformity of the target with a surface relief in glow discharge

The energy spectra of ion and fast atom flows at the target with a periodical surface relief of small amplitude in glow discharge are calculated. Distributions of the effective sputtering yield of the target and the sputtered atom flow density along its surface are found. It is shown that contributions of the fast atom flow non-uniformity in them are much less than that of the ion flow non-uniformity and may not be taken into account in the simulation of target sputtering in glow discharge when its surface relief element dimensions are small in comparison with the discharge cathode sheath length.