Statistical mechanism of the formation of the energy spectra of sputtered molecular clusters

The energy spectra of Si _n O _m ^? clusters sputtered from Si targets by Xe⁺ ions with O₂ pumping onto a bombarded surface, as well as by O ₂ ⁺ ions, are studied. It is shown that the form of the Si _n O _2n+1 ^? energy distributions does not depend on the experimental conditions. Significant differences in the energy spectra of O and Si monomers as compared to Si _n O _2n+1 ^? clusters are revealed. The mentioned features of the energy distribution of Si _n O _m ^? clusters are explained within the framework of the statistical recombination mechanism of their formation in combinatorial synthesis processes.