Effect of oxide surface metallization under ion-beam irradiation |
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Authors: | N V Alov |
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Institution: | 16765. Faculty of Chemistry, Moscow State University, Moscow, 119991, Russia
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Abstract: | Changes in the surface chemical composition of WO3, Ta2O5, MoO3, and Nb2O5 oxides after Ar+ ion irradiation and those of the WO3 surface after He+ ion irradiation under high vacuum were investigated by X-ray photoelectron spectroscopy. Upon Ar+ ion irradiation with an energy of 3 keV, the pronounced effect of ion-beam metallization was observed on the WO3 oxide surface; a moderate effect was found for the Ta2O5 oxide surface; a weak one for the MoO3 oxide surface; and no effect was discovered for the Nb2O5 oxide surface. At the saturation dose, 44 at % W, 12 at % Ta, and 2 at % Mo form on the oxide surfaces. Irradiation by light He+ ions with energies of 1 and 3 keV results in WO3 surface metallization. At the saturation dose, 2 and 10 at % W (at 1 and 3 keV, respectively) forms on the oxide surface. The nature, mechanisms, and features of the oxide surface metallization effect induced by ion-beam irradiation are discussed. |
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