| 用同步辐射小角衍射方法研究多层膜周期结构 |
| |
| 引用本文： | 王俊,崔明启,徐文轩,黄宇营,王德武,刘建飞,冼鼎昌.用同步辐射小角衍射方法研究多层膜周期结构[J].中国物理 C,1994,18(1):13-19. |
| |
| 作者姓名： | 王俊 崔明启 徐文轩 黄宇营 王德武 刘建飞 冼鼎昌 |
| |
| 作者单位： | 中国科学院高能物理研究所 |
| |
| 摘 要： | 用磁控溅射方法制备的W/Si、Nb/Si多层膜在北京正负电子对撞机同步辐射装置衍射实验站进行了掠入射Bragg衍射实验,对多层膜结构的周期性、周期厚度、组分等进行了分析,并与模拟计算结果进行了比较.
|
| 关 键 词： | 同步辐射 磁控溅射 多层膜 小角衍射 结构分析 |
Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method |
| |
| Wang Jun,Cui Mingqi,Xu Wenxuan,Huang Yuying,Wang Dewu,Liu Jianfei,Xian Dingchang.Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J].High Energy Physics and Nuclear Physics,1994,18(1):13-19. |
| |
| Authors: | Wang Jun Cui Mingqi Xu Wenxuan Huang Yuying Wang Dewu Liu Jianfei Xian Dingchang |
| |
| Abstract: | W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared. |
| |
| Keywords: | Synchrotron radiation Sputtering Multilayer Small angle diffraction Analyse of constitution |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《中国物理 C》浏览原始摘要信息 |
| 点击此处可从《中国物理 C》下载免费的PDF全文 |
|
