| 北京同步辐射软X光反射率计装置及其物理工作 |
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| 引用本文： | 崔明启,王俊,缪建伟,黄宇营,唐鄂生,冼鼎昌,邵景鸿,薛松,徐正良,孙剑辉.北京同步辐射软X光反射率计装置及其物理工作[J].中国物理 C,1995,19(1):82-86. |
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| 作者姓名： | 崔明启 王俊 缪建伟 黄宇营 唐鄂生 冼鼎昌 邵景鸿 薛松 徐正良 孙剑辉 |
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| 作者单位： | 中国科学院高能物理研究所，中国科学院长春光学精密机械研究所 |
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| 摘 要： | 介绍了安装在北京同步辐射装置上专门用于软X光多层膜研究的反射率计系统,给出了在该装置上测量得到的Al滤光片的软X光透射谱和Nb/Si多层膜的高角反射谱,用磁控溅射方法自制的Nb/Si多层膜样品在17.59um附近得到的反射率为32%.
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| 关 键 词： | 同步辐射 反射率计 软X光多层膜 反射率 |
New Soft X-Ray Reflectometer on Beijing Synchrotron Radiation Facility and Some Basic Results of Physics Work |
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| Cui Mingqi, Wang Jun, Miao Jianwei, Huang Yuying,Tang Esheng, Xian Dingchang.New Soft X-Ray Reflectometer on Beijing Synchrotron Radiation Facility and Some Basic Results of Physics Work[J].High Energy Physics and Nuclear Physics,1995,19(1):82-86. |
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| Authors: | Cui Mingqi Wang Jun Miao Jianwei Huang Yuying Tang Esheng Xian Dingchang |
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| Abstract: | This paper describes the new soft X-ray reflectometer with multilayer monochromator on beam line 3B1 of Beijing Synchrotron Radiation Facility (BSRF). Thetransmitted spectrum of aluminum filter and reflected spectrum of Nb/Si multilayer in soft X-ray region have been analysed with this reflectometer. The reflectivityof a Nb/Si multilayer manufactured in our group (41 layers, d = 13.45 and wavelength near 17.59um at 42 deg.) has been measured to be 32%. |
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| Keywords: | synchrotron radiation soft X-ray reflectometer multilayer reflectivity |
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