| Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry |
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| 作者姓名： | WEI Chunlong |
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| 作者单位： | WEI Chunlong(Department of Electronic Engineering，Shanghai University Jiading Campus，Shanghai 201800，China)CHEN Mingyi; DING Zheng(Department of Mechanic Engineering，Shanghai University Jiading Campus)，Shanghai 201800，China)WANG Zhijiang(Shanghai Inst |
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| 摘 要： | l.IntroductionForphase-stepping(orphase-shifting)interferometrytherearetwomainsourcesoferror:thereferencephaseerrorandthenonlinearerrorofdetector.Inearlyresearch,onlyCarreISalgorithm1]cancompletelyeliminatethelinearreferencephaseerroriftheinterferogramsaresampledintermsofthesamephaseshiftinginterval.Recemtly,manya1gorithmshavebeendeveloPedtoreducethesetwoerrorsources.J.SchmitandK.Creath2Jusedanextendedaveragingtechniquetoobtainasetoferror-comPensatingalgo-rithmsthatareinsensitivetothelin…
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| 收稿时间： | 1996/10/9 |
Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry |
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| WEI Chunlong.Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry[J].中国激光(英文版),1997,6(2):117-121. |
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| Authors: | WEI Chunlong |
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| Abstract: | A new six-frame algorithm based on Hariharan' s five-frame algorithmis derived. Although six-frame interferograms are needed, the new algorithm is immune to the effect of reference phase error or the second order detector nonlinearity error.Furthermore, if they exist simultaneously, the new algorithm is insensitive to both of the errors. It is better than B. Zhao and Y. Surrel's six-frame algorithm to some extent. |
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| Keywords: | interferometry phase-stepping algorithm |
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