| KrF Laser-induced Damage to ZrO_2/SiO_2 Coatings |
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| 作者姓名： | WANG Naiyan GAO Huailin |
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| 作者单位： | China Institute of Atomic Energy，P. O. Box 275-7，Bejijng 102413，China |
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| 摘 要： | ＫｒＦＬａｓｅｒ－ｉｎｄｕｃｅｄＤａｍａｇｅｔｏＺｒＯ_２／ＳｉＯ_２Ｃｏａｔｉｎｇｓ￥ＷＡＮＧＮａｉｙａｎ；ＧＡＯＨｕａｉｌｉｎ（ＣｈｉｎａＩｎｓｔｉｔｕｔｅｏｆＡｔｏｍｉｃＥｎｅｒｇｙ，Ｐ．Ｏ．Ｂｏｘ２７５－７，Ｂｅｊｉｊｎｇ１０２４１３，Ｃｈｉｎ...
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| 收稿时间： | 1994/7/4 |
KrF Laser-induced Damage to ZrO_2/SiO_2 Coatings |
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| WANG Naiyan, GAO Huailin.KrF Laser-induced Damage to ZrO_2/SiO_2 Coatings[J].中国激光(英文版),1995,4(2):161-168. |
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| Authors: | WANG Naiyan GAO Huailin |
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| Abstract: | A laser induced coating damage testing facility has been set up in CUE basedon a 450 mJ KrF excimer laser. Damage threshold measurements at 248 um have been madefor multi-dielectrical HR and AR coatings. The experimental results show that ① the character of the damage is melting and crack ; ② the damage starts at the center of the laser beamspot for HR coating and at the boundary of the laser beam-spot for AR coating; ③ the damage threshold of ZrO2/SiO2 coatings is less than 1 J/cm2. The main reason for the low damage threshold is due to the large absorption coefficient of the ZrO2 layers, the heat stress within the coatings and the formation of the surface plasma. In order to increase the damage threshold of the coatings, it's necessary to overcome the disadvantageous factor and chose the fluorine-resistant materials as well as improve the construction of the coatings. |
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| Keywords: | KrF laser coating laser-induced coating damage |
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