Infrared optical characterization of GaAsAlxGa1?xAs submicron heterostructures |
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| Authors: | MS Durschlag TA DeTemple |
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| Institution: | Electrical Engineering Research Laboratory, Department of Electrical Engineering, 1406 West Green Street, University of Illinois, Urbana, IL 61801, U.S.A. |
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| Abstract: | Infrared optical characterization of submicron, multiple layers of AlxGa1?xAsGaAs on a GaAs substrate is reported, demonstrating that layer resolved phonon frequencies, electron concentrations and mobilities can be obtained. |
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