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Adatom concentration on GaAs(001) during MBE annealing
Authors:M D Johnson  K T Leung  A Birch  B G Orr  J Tersoff
Institution:

a The Harrison M. Randall Laboratory, University of Michigan, Ann Arbor, MI 48109-1120, USA

b IBM Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA

Abstract:We study the concentration of adatoms on GaAs(001) during annealing under MBE conditions. By rapidly cooling the sample from typical growth temperatures and typical As overpressures, the thermal concentration of adatoms can be frozen into small islands on the terraces. The area of the resulting islands is measured with STM far from terrace steps, giving an estimate of the concentration of adatoms during equilibrium. We find that a surprisingly large concentration of adatoms is present for typical growth temperatures, e.g. 0.18 monolayer at 600°C. Possible consequences for current growth models are discussed.
Keywords:Arsenic  Epitaxy  Equilibrium thermodynamics and statistical mechanics  Evaporation and sublimation  Gallium  Gallium arsenide  Low index single crystal surfaces  Models of surface chemical reactions  Models of surface kinetics  Molecular beam epitaxy  Reflection high-energy electron diffraction (RHEED)  Scanning tunneling microscopy  Semiconducting surfaces  Surface chemical reaction  Surface thermodynamics
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