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Theoretical and experimental guideline of optimum design of defect-inspection apparatus for transparent material using phase-shift illumination approach |
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| Authors: | Onishi Yoshito Seo Yoshiho Matsuoka Masaoki Serikawa Shigeru Tsugane Ken |
| Institution: | 1.Research & Development Group, Center for Digital Services, Instrumentation Innovation Center, Hitachi, Ltd, Higashi-Koigakubo 1-280, Kokubunji-shi, Tokyo, 185-8601, Japan ;2.Manufacturing & Technology Business Group, Design Strategy Div., Hitachi High-Tech Corporation, 1600 Kami, Kamisato-machi, Kodama-gun, Saitama, 369-0395, Japan ;3.Inspection System Business Div., Hitachi High-Tech Solutions Corporation, 1600 Kami,Kamisato-machi,Kodama-gun, Saitama, Japan ;4.Nano-Technology Solution Business Group, Hitachi High-Tech Corporation, 552-53, Shinkocho, Hitachinaka-shi, Ibaraki, Japan ; |
| Abstract: | Optical Review - Machine vision system has great significance for the automatic inspection to enhance unclear defects. For the purpose of the improvement of the recognition accuracy in the... |
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