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Determination of displacement with a piezoelectric transducer using phase-shift algorithms
Authors:Cheng-Chung Jaing  Yi-Lin Shie  Chien-Jen Tang  Yeuh-Yeong Liou  Chun-Ming Chang  Chii-Rong Yang
Institution:(1) Department of Philosophy, Harvard University, Cambridge, MA 02138, USA
Abstract:This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.
Keywords:displacement  phase shifting interferometry  algorithm  Twyman-Green interferometer  Hariharan algorithm  piezoelectric transducer
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