Design and Evaluation of an N:N Optical Coupler Using an Integrated Waveguide Mirror

We proposed and fabricated an N:N optical coupler using an integrated waveguide mirror. Optical circuits can be miniaturized with small bending by reflecting mirrors. The parabolic curve was applied to the mirror shape because it was necessary to collimate the reflected beam so as to distribute the input light to the output waveguides. We fabricated the 8:8 optical coupler using silica waveguide. The chip size was about 7mm x 15mm. The excess loss of the device was about 8 dB larger than simulation results calculated using beam propagation method. The dependence on the wavelength and polarization was about 0.4 and 0.15 dB, respectively. The excess loss was mainly attributed to the mirror tilt and will be reduced by optimizing the etching conditions to decrease the mirror tilt angle.