|
|||||
|
|
Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders |
|
| Authors: | L El Mir Z Ben Ayadi K Djessas S Alaya |
| Institution: | a Laboratoire de physique des matériaux et des nanomatériaux appliquée à l’environnement, faculté des sciences de Gabès, Cité Erriadh Manara Zrig, 6072 Gabès, Tunisia b Laboratoire de mathématiques et physique des systèmes (MEPS), université de Perpignan, 52, avenue Paul Alduy, 66860 Perpignan cedex, France c Institut des nanosciences de Paris (INSP) UMR CNRS 7588, universités Pierre-et-Marie-Curie (Paris 6) et Denis-Diderot (Paris 7), campus Boucicaut, 140, rue de Lourmel, 75015 Paris, France |
| Abstract: | Highly transparent, n-type conducting ZnO thin films were obtained by low temperature magnetron sputtering of (Co, Al) co-doped ZnO nanocrystalline aerogels. The nanoparticles of ∼30 nm size were synthesized by a sol-gel method using supercritical drying in ethyl alcohol. The structural, optical and electrical properties of the films were investigated. The ZnO films were polycrystalline textured, preferentially oriented with the (0 0 2) crystallographic direction normal to the film plane. The films show within the visible wavelength region an optical transmittance of more than 90% and a low electrical resistivity of 3.5 × 10−4 Ω cm at room temperature. |
| Keywords: | Sputtering Sol-gel method Zinc oxide Nanostructures Transparent conductive oxide (TCO) |
| 本文献已被 ScienceDirect 等数据库收录！ | |