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Influence of substrate temperature on surface textured ZnO:Al films etched with NaOH solution |
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| Authors: | Ying Wang Yousong GuShou Peng Wanyu Ding Hualin Wang Weiping Chai |
| Institution: | a School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China b Engineering Research Center of Optoelectronic Materials and Devices, Education Department of Liaoning Province, Dalian 116028, China c School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China d China Triumph International Engineering Co., Ltd., Bengbu 233018, China |
| Abstract: | Transparent conducting Al-doped ZnO (ZnO:Al, AZO) thin films with good optical and electrical characteristics were prepared by direct current pulse magnetron sputtering. Textured surfaces of AZO films were obtained by etching with NaOH solution successfully and the effect of substrate temperature on the surface texture was investigated. The surface is covered with craters after etching with 5% NaOH solution, and the crater diameter decreases gradually as substrate temperature increases. For AZO film deposited at 270, the crater diameters is 0.5-1 μm, which is an effective surface texture for light trapping. |
| Keywords: | ZnO:Al Texture Light trapping Haze |
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