Tailoring the wettability of patterned silicon surfaces with dual-scale pillars: From hydrophilicity to superhydrophobicity |
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Authors: | Yang He Chengyu Jiang Hengxu YinWeizheng Yuan |
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Institution: | Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an 710072, PR China |
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Abstract: | Wettability tailoring of patterned silicon surface has great potential in fields producing integrated circuits, solar cells, sensors, detectors, and micro/nano electromechanical systems. The present paper presents a convenient yet effective method of combining reactive ion etching and catalyzed etching to prepare silicon surface with micro-nano dual-scale pillars. The experimental results indicate that the hydrophilic surface transformed to a superhydrophobic surface when micro-nano dual-scale pillars were formed. The surface preserved superhydrophobicity even when the geometric parameters of the micropillars were changed. Overhangs of water drops on steep micro-nano dual-scale pillars result in superhydrophobicity. This method offers a new way for tailoring the wettability of patterned silicon surfaces. |
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Keywords: | Wettability Superhydrophobicity Hydrophilicity Patterned silicon surface |
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