Enhancing the crystallinity and surface roughness of sputtered TiO<sub>2</sub> thin film by ZnO underlayer期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

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Enhancing the crystallinity and surface roughness of sputtered TiO₂ thin film by ZnO underlayer

Authors:	Feng Huang Bingjun Wu Ming Li Yousong Jiang

Institution:	^a Hefei National Laboratory for Physical Sciences at Microscale, and USTC-SHINCRON Joint Laboratory, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, PR China ^b Shincron Co., Ltd., Shinagawa-Ku, Tokyo 140-0011, Japan

Abstract:	TiO₂ and TiO₂/ZnO double layer films were sputtered on glass substrates. It was found that a thin ZnO underlayer is helpful for tailoring the microstructure and surface morphology of the TiO₂ film. By applying a 70-nm-thick ZnO underlayer, a TiO₂ thin film of 100 nm in thickness with well crystallized anatase phase and rough surface was successfully fabricated without heating the substrate. Relatively high photo-catalytic activity and good hydrophilic properties were observed in such TiO₂/ZnO double layer films.

Keywords:	Titanium oxide Zinc oxide Photo-catalysis Sputtering Super-hydrophilic
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