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Effect of Mn doping on the nanostructure and optical properties of ZnO films synthesized by magnetron sputtering
Authors:ZF Wu  XM Wu  LJ Zhuge  B Hong  XM Yang  T Yu  JJ He  Q Chen
Institution:a School of Physics Science and Technology, Soochow University, Suzhou 215006, China
b Yancheng Institute of Technology, Yancheng 224003, China
c Analysis and Testing Center, Soochow University, Suzhou 215006, China
d Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China
e Beijing Institute of Graphic Communication, Beijing 102600, China
Abstract:We investigated the microstructure and optical properties of Zn1−xMnxO films synthesized by the magnetron sputtering technique. Structural analyses suggest that Mn occupied the Zn sites successfully and did not change the wurtzite structure of ZnO. In addition, nanoscale columnar grain arrays were found in the Mn-doped ZnO films. The experimental results indicate that moderate Mn doping could enhance the photoluminescence emission of ZnO. The possible origin of the emissions from our samples was also explored.
Keywords:ZnO  Mn doping  Optical properties  Nanostructure
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