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溶胶-凝胶法制备ZnO薄膜及其光致发光性质
引用本文:林红,董名友.溶胶-凝胶法制备ZnO薄膜及其光致发光性质[J].光谱实验室,2006,23(2):349-352.
作者姓名:林红  董名友
作者单位:1. 海南师范大学物理系,海口市龙昆南路99号,571158
2. 海口科宇电子设备厂,海口市,571100
摘    要:利用溶胶-凝胶法在石英衬底上制备了ZnO薄膜,通过测量样品的透射谱、X射线衍射谱、扫描电子显微镜(SEM)图像和光致发光谱研究了其结构特征和发光性质.结果表明:在衍射角2θ=34.32°处出现了对应(002)晶面的强衍射峰,ZnO膜呈多晶状态,具有六角纤矿晶体结构和良好的C轴择优取向,薄膜中颗粒的平均粒径为56nm;光致发光呈多发光峰状,有中心波长为378nm的紫带,520nm绿带,446nm附近的蓝带以及发现未见报道过的绿带以后中心波长为586nm和570nm两个弱发射峰.实验结果表明,制备的ZnO薄膜具有发光特性,但内部与深能级发射相关的结构缺陷浓度还是较高,样品中两个低能量光致发光应来源于晶粒间界的缺陷能级,多缺陷能级导致了多发射峰的光致发光谱.

关 键 词:溶胶-凝胶法  ZnO薄膜  光致发光谱  晶界缺陷
文章编号:1004-8138(2006)02-0349-04
收稿时间:2004-11-02
修稿时间:2005-11-30

ZnO Thin Films Prepared by Sol-Gel Method and It's Photoluminescence Properties
LIN Hong,DONG Ming-You.ZnO Thin Films Prepared by Sol-Gel Method and It''''s Photoluminescence Properties[J].Chinese Journal of Spectroscopy Laboratory,2006,23(2):349-352.
Authors:LIN Hong  DONG Ming-You
Abstract:ZnO films on a quartz glass subtrates was prepared by sol-gel method,and characterized by X-ray diffraction(XRD) pattern,SEM photographs and photoluminescence.The mean grain size of ZnO films were calculated by Debys-scherrer formula as 56nm.The ZnO films are composed of hexagonal wurtzite structure and polycrystalline,and showed sharp diffraction peak for ZnO(002) with highly C-axis oriented.Photoluminescence and transmittance spectra of ZnO films at room temperature show many emission bands, one being a narrow violet band with central wavelength of 378nm,other wide visible bands with central wavelengths of 520nm and 446nm and another two weak emission bands,which corresponds to the transition from the structure defects levels.The sol-gel prepared ZnO films has photoluminescence emission properties,but more structure defects of the deep level emission.
Keywords:Sol-Gel  ZnO Films  Photoluminescence(PL)  Boundary Defect
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