| 铜薄膜电子-声子耦合系数的实验研究 |
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| 引用本文： | 马维刚,王海东,张兴,过增元.铜薄膜电子-声子耦合系数的实验研究[J].工程热物理学报,2010(3). |
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| 作者姓名： | 马维刚 王海东 张兴 过增元 |
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| 作者单位： | 清华大学工程力学系热科学与动力工程教育部重点实验室; |
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| 基金项目： | 国家自然科学基金资助项目(No.50676046;No.50730006) |
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| 摘 要： | 电子元件的超微型化和高集成化,对金属互连线的导热性能提出极高的要求;同时,新型高性能光电材料的开发,又需要尽可能降低受光激发电子与声子之间的耦合。电子、声子的相互作用,对于能量转换与传递过程微观机理的研究至关重要。这些载能粒子的作用时间都在飞秒-皮秒量级,本文采用飞秒激光瞬态热反射方法,对铜薄膜中微观粒子作用过程进行了飞秒量级的实验研究。通过对实验系统精细调节,得到了理想的信号曲线,在此基础上测量了不同泵浦光功率下沉积在硅基底上厚度为60 nm铜薄膜的电子-声子耦合系数,测量结果为(11～12)×10~(16)W/(m~3K),和理论值14×10~(16)W/(m~3K)较为接近,并且不随泵浦光强发生变化。
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| 关 键 词： | 电子-声子耦合系数 瞬态热反射 飞秒激光 铜薄膜 |
EXPERIMENTAL STUDY OF ELECTRON-PHONON COUPLING FACTOR OF COPPER THIN FILM |
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| MA Wei-Gang WANG Hai-Dong ZHANG Xing GUO Zeng-Yuan.EXPERIMENTAL STUDY OF ELECTRON-PHONON COUPLING FACTOR OF COPPER THIN FILM[J].Journal of Engineering Thermophysics,2010(3). |
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| Authors: | MA Wei-Gang WANG Hai-Dong ZHANG Xing GUO Zeng-Yuan |
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| Institution: | Key Laboratory of Thermal Science and Power Engineering of Ministry of Education;Department of Engineering Mechanics;Tsinghua University;Beijing 100084;China |
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| Abstract: | Metallic thin wires are widely used as interconnectors in the ultra-miniature and highly-integrated systems and expected to exhibit high heat conductance.While in the development of novel photoelectric material,the coupling between electrons and phonons should be reduced as much as possible.The electron-phonon coupling is dominant to energy exchange in metals and the interaction time is in the order of femto to picoseconds.In this paper,the electron-phonon coupling factor of a copper nanofilm with thickness... |
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| Keywords: | electron-phonon coupling factor transient thermoreflectance femtosecond laser copper thin film |
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