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Ion Beam Polishing for K9 Glass
作者姓名:SU  Zhiwei  CHEN  Qingchuan
摘    要:

关 键 词:离子束抛光  AFM  超光滑表面  制造技术  K9玻璃

Ion Beam Polishing for K9 Glass
SU Zhiwei CHEN Qingchuan.Ion Beam Polishing for K9 Glass[J].Southwestern Institute of Physics Annual Report,2005(1):147-149.
Abstract:K9 glass is a common material of optics and micro system, with cheaper price and better processing function. With the development of the optical and micro system, the technique of manufacturing micron/nanometer dimensions microstructure and micro device on K9 glass has used in photoelectron, microwave and diffraction optics device et al The coarse surface of optics and microwave device can cause the light scattering and signal losing, and the function of device reduced. So the supersmooth surface plays an important role in optic and microwave device.
Keywords:K9 Glass Ion beam polishing AFM Supersmooth surfaces
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