Designing arbitrary nanoscale patterns by a nanocavity waveguide with omnidirectional illumination

We report one- and two-dimensional arbitrary patterns which are achieved by nanocavity waveguides made of a quasi-metal?Cdielectric-metal heterostructure with omnidirectional illumination. This proposed heterostructure supports the surface plasmon polaritons whose phase and group velocities have opposite sign for given frequency. Negative refraction and reflection in the waveguide result in imaging nanolithography and the omnidirectional property can be well understood by the dispersive relation of the nanocavity waveguide. Numerical results demonstrate that such an omnidirectional nanolithography scheme is feasible for arbitrary 1D gratings and 2D linearly chirped gratings with TM and circular polarized incidence, respectively, at 365?nm.