ANALYSIS OF DUAL FREQUENCY CONFINED CAPACITIVELY COUPLED PLASMA AT LOW POWER |
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Authors: | S Helhel |
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Institution: | (1) Akdeniz University, Electronics and Communication Eng., Antalya, Turkey |
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Abstract: | Confined dual frequency hydrogen plasma discharge has been investigated with microwave interferometer method and radial profiles
are taken by Abel inversion technique. Dual radio-frequency sources, operating at 27.12MHz and 1.94MHz, are coupled to each
other through the plasma. 27.12MHz RF power is used to enhance plasma density and 1.94MHz power is used to enhance ion acceleration
energy to the electrode. Radial density profiles has been taken for comparing the effects of low frequency source that the
secondary RF source causes reduction in plasma density due to the sheath expansion. Instead radial density profile is assumed
as flat by most of the models, there is about 2.5eV of potential drop occurs from centre to boundary at 40W of primary source
power. It has been observed that increasing sheath width (increasing the secondary source power to primary source power) reduces
the bulk plasma volume and makes potential profile flattening in y direction. While the high frequency power is dissipated
by electrons in the bulk plasma; low frequency power is mostly dissipated by ions in the sheath region. Using both high and
low frequency power, we may control plasma density and ion acceleration energy to the electrode simultaneously. |
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Keywords: | Confined Capacitively Coupled Plasma Dual frequency Zebra type interferometer |
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