High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator |
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Authors: | Bing Xiong Jianbo Tian Jian Wang Pengfei Cai Changzheng Sun and Yi Luo |
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Institution: | (1) State Key Lab of Integrated Optoelectronics Department of Electronic Engineering, Tsinghua University, Beijing, 100084, P.R. China |
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Abstract: | A high-speed submount has been designed and fabricated for 40 Gb/s electroabsorption (EA) modulators. The submount contains
a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching. The CPW transmission line is designed to ensure low microwave loss and reflection,
and Ti/Cu/Ni/Au metal is adopted for electrode fabrication to guarantee good contact with the Ta2N thin-film. The typical reflection coefficient of fabricated submount is estimated to be lower than−21 dB up to 40 GHz. As
a demonstration, a high-speed EA modulator was chip-level packaged using the high-speed submount, and the measured small-signal
modulation bandwidth was over 40 GHz. |
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Keywords: | High-speed submount Low-Loss Coplanar Waveguide (CPW) Thin-Film Resistor 40 Gb/s Electroabsorption (EA) Modulator |
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