Influence of the quantum size effect for grazing electrons on the electronic conductivity of metal films |
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Authors: | G M Mikhailov I V Malikov A V Chernykh |
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Institution: | (1) Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences, 142432 Chernogolovka, Moscow Region, Russia |
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Abstract: | The thickness dependence of the electronic conductivity of thin (5–150 nm) single-crystal (100) films of refractory metals
is investigated at different temperatures ranging from 4.2 K to room temperature. Regions of square-root, quasilinear, and
quadratic dependences are observed. The quasilinear thickness dependence is explained by the influence of quantum effects
on the transverse motion of electrons in the case when electron scattering by the film surfaces dominates. For macroscopic
film thicknesses 30–50 nm, much greater than the Fermi wavelength of an electron, quantum corrections to the electronic conductivity
reach values of the order of 50%. This is a consequence of the quantum size effect for grazing electrons, which leads to an
anomaly in electron scattering by the film surfaces. The region of the quadratic thickness dependence corresponds to the quantum
limit, and the square-root region corresponds to the classical limit. The effect is explained in a quasiclassical two-parameter
model (the effective angle α* for small-angle electrons and the parameter γ, equal to the ratio of this angle to the diffraction angle) that takes into account the diffraction angular limits for grazing
electrons. The effect occurs for parameters α*≪1 and γ∼1 and differs from the “ordinary” quantum size effect.
Pis’ma Zh. éksp. Teor. Fiz. 66, No. 11, 693–698 (10 December 1997) |
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