MEMS光开关阵列的设计与应用

针对如何缩短防空导弹系统反应时间的问题，设计了一种MEMS(micro electro mechanical system，微机电系统)光开关阵列，用于控制防空导弹系统各分系统模块之间的信号传输。该光开关阵列由8组双层静电梳齿结构的光开关组成，每组光开关均控制一个防空导弹系统子模块的通断。根据拉格朗日 麦克斯韦方程，建立系统的机电动力学模型，确定质量、弹性系数、电容、气膜阻尼等主要参数。仿真结果表明:MEMS光开关的响应时间为0.627 ms，稳态位移为4.724 m，最大位移为6.801 m，将相同阶段的反应时间缩短为原先的1/4。由此可以得出结论:MEMS光开关阵列不仅缩短了防空导弹系统的反应时间，而且保证了系统的稳定性。

Design and application of MEMS optical switch array

For the problem of reducing the response time in air defense missile system, a micro electro mechanical system (MEMS) optical switch array was designed to control the signal transmission of subsystems in air defense missile system. The optical switch array which was constituted by 8 group double layer electrostatic comb structures,was used to control the On and Off state in every single subsystem. According to the Lagrange Maxwell equation, the electromechanical dynamics model was established, and the main parameters were confirmed including the mass, the elastic, the capacitance, the air film damp and so on. Then the parameters with genetic algorithm were optimized. The simulation result shows that the response time equals 0.627 ms, the steady state displacement equals 4.724 m, the maximal displacement equals 6.801 m, the response time is one fourth of the original time. The result indicates that the MEMS optical switch array plays a role not only in reducing the response time, but also in ensuring the stability in air defense missile system.